| › Original Equipment Manufacturer: |
Yes |
| › Exact Model Type: |
E500 EHPI |
| › OEM Serial ID: |
ES193716 |
| › Completeness: Total/partial/Donor tool? Please list missing parts. |
Partial |
| › Date of first usage? |
NA |
| › Technic special customized for Infineon: |
NA |
| › Correct maintained: |
Yes |
| › Any damages/deficits known: |
No |
| › Manuals existing: |
No |
| › Crated: If yes…/ professional with protocol / partly / simple: |
No |
| › Any upgrades / extensions: |
BDM (beam drift monitor) |
| › Useable for which products: |
8" wafers |
| › Wafer size (if applicable): |
200mm |
| › Any consumables at end of lifetime: |
Yes (source, electrode, |
| › Procured from OEM or from second hand: |
From Infineon Villach |
| › Any refurbishments done: |
No |
| |
|
| › Was there a significant system failure in the last three years: |
No |
| › Any contaminations known: |
BF3,ASH3,PH3 |
| › IFX Inventory number: MCIEHP503 |
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