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Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
Make |
Model |
|
|
$ |
|
|
87948
|
Applied Materials
|
Applied Materials |
8300 |
in Single Chamber Plasma Tools
APPLIED MATERIALS CONTROLLER:Controller
|
1
|
|
|
|
Scotia, New York |
|
|
87949
|
Applied Materials
|
Applied Materials |
8300 |
in Single Chamber Plasma Tools
APPLIED MATERIALS SYSTEM ELECTRONICS RACK:System Electronics Rack
|
1
|
|
|
|
Scotia, New York |
|
|
34890
|
LAM Research Co
|
LAM Research Co |
490 AUTO ETCH |
in Single Chamber Plasma Tools
LAM RESEARCH SIX INCH NITRIDE ETCHER:Six Inch Nitride Etcher
Automated Cassette to Cassette single wafer etching.
|
1
|
|
|
F* |
Scotia, New York |
|
|
225948
|
Plasma-Therm
|
Plasma-Therm |
790 |
in Single Chamber Plasma Tools
Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F - Manually Loaded Process Chamber with 8” (dia.) Cathode
- Gas Distribution Panel with 4ea Gas Channels
- MKS 1479 Metal Sealed Mass Flow Controllers
- 4ea Additional Gas Channels Available
- RFPP RF5S RF Generator: 500W @ 13.56MHz
- RFPP AMN-5 Auto Matching Network
- RFPP AMNPS-2A Auto Matching Network Controller
- Leybold TMP 361 Turbomolecular Pump
- Leybold NT 150/360 Turbomolecular Pump Controller
- EquipmentWorks 2.6 Application SW
- Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
- All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
- All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
- All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
- All SMC Pneumatic Valves Available from SMC USA
- Standard 21” Flat Panel Monitor, Keyboard & Mouse
- Edwards QDP40 Dry Roughing Pump
- NESLAB HX-75 Chiller
- Electrical Disconnect Box - 208V, 60Hz, 3 Ph
- System Fully Refurbished & Ready for Demonstration
- Guaranteed to Meet or Exceed OEM Specifications
- Price……$ 80,000.00 USD
|
1
|
|
80,021.44 |
|
Plano, Texas |
|
|
3011
|
Plasma-Therm
|
Plasma-Therm |
Wafer Batch 740/740 |
in Single Chamber Plasma Tools
PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:Dual Plasma Etch and Reactive Ion Etch Processing Systems
System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.
|
1
|
|
|
|
Scotia, New York |
|
|
4054
|
Plasma-Therm
|
Plasma-Therm |
73/74 |
in Single Chamber Plasma Tools
PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:Combination PECVD and Dual Plasma Etch/Reactive Ion Etch Processing Systems
|
1
|
|
|
|
Scotia, New York |
|
|
50854
|
Plasma-Therm
|
Plasma-Therm |
VII 734 |
in Single Chamber Plasma Tools
PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:Combination Plasma Deposition System/RIE
|
1
|
|
|
F* |
Scotia, New York |
|
|
11919
|
Plasma-Therm
|
Plasma-Therm |
VII 734MF |
in Single Chamber Plasma Tools
PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:Plasmatherm RIE/Plasma Etch System
|
1
|
|
|
F* |
Scotia, New York |
|
|
165893
|
PlasmaQuest
|
PlasmaQuest |
6" Load-Lock |
in Single Chamber Plasma Tools
PlasmaQuest Microwave-ECR Plasma etch system:- PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
- Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
- ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
- Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
- Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
- System can be offered "as is" to experienced buyers.
- Full refurbishment for etch and/or PECVD processing can be considered.
- Configured with 2 modules including power & controls rack and vacuum module.
- Computer controller may function, but upgrade is recommended and should be possible.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
206582
|
Plasma-Therm
|
Plasma-Therm |
BT 6" RIE MF |
in Single Chamber Plasma Tools
PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":Reactive Ion Etch System BatchTop VII
|
1
|
|
|
|
Scotia, New York |
|
|
45428
|
Plasma-Therm
|
Plasma-Therm |
790 ICP |
in Single Chamber Plasma Tools
PLASMATHERM ICP PLASMA ETCHER:Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
|
1
|
|
|
F* |
Scotia, New York |
|
|
124315
|
Plasma-Therm
|
Plasma-Therm |
790 11" RIE |
in Single Chamber Plasma Tools
PLASMATHERM REACTIVE ION ETCH SYSTEM 11":Reactive Ion Etch System - 11" Electrode
|
1
|
|
|
F* |
Scotia, New York |
|
|
45430
|
Plasma-Therm
|
Plasma-Therm |
790 11 RIE |
in Single Chamber Plasma Tools
PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:Reactive Ion Etch System 11" Electrode
|
1
|
|
|
|
Scotia, New York |
|
|
201152
|
Plasma-Therm
|
Plasma-Therm |
790 RIE PECVD 11" |
in Single Chamber Plasma Tools
PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.
Both top and bottom electrodes can be powered sequentially.
|
1
|
|
|
|
Scotia, New York |
|
|
142821
|
Plasma-Therm
|
Plasma-Therm |
Unaxis 790 |
in Single Chamber Plasma Tools
PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:Shuttle Load Lock System
|
1
|
|
|
|
Scotia, New York |
|
|
147500
|
Surface Tech Sys
|
Surface Tech Sys |
MXP Multiplex ICP HR |
in Single Chamber Plasma Tools
SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:Chlorine Etcher - Year 2003
|
1
|
|
|
|
Scotia, New York |
|
|
102178
|
Surface Tech Sys
|
Surface Tech Sys |
MXP Multiplex ICP ASE HR |
in Single Chamber Plasma Tools
SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:Silicon Etcher - Year 2003
|
1
|
|
|
|
Scotia, New York |
|
|
184779
|
Technics
|
Technics |
Micro Stripper -- Series 200 |
in Single Chamber Plasma Tools
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:Technics Micro Stripper Series 200 Plasma System
|
1
|
|
|
F* |
Scotia, New York |
|