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Vertical LPCVD Furnaces
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Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Process Capabilities
Number of Cassette Platforms
Robot Manufacturer/Model
Controller Manufacturer/Model
Software Revision Level
Maximum Temperature
Minimum Temperature
Number of Control Zones
Flat Zone Length
Overtemperature Protection
Process Gases
Vacuum Pump Manufacturer/Model
Cassette to Cassette
External Cooling
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
Operating Air Pressure
Air Consumption
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Vacuum Required
CE Marked
Year of Manufacture
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height