Unit Price |
Unstated |
Number of Units |
3 |
Manufacturer | Leybold |
Model | 1500SL |
Inlet Flange | Conflat
200.0 mm (7.874 in)
|
Foreline Flange | KF
25.0 mm (0.984 in)
|
Pumping Speed Nitrogen | 1,600.0 l/s (3,390.5 CFM) |
Pumping Speed Water Vapor | 4,600.00 l/s (9,747.83 CFM) |
Pumping Speed Argon | 1,300.00 l/s (2,754.82 CFM) |
Ultimate Pressure |
-3.75E-10(En) torr (5.00E-10 mbar) |
Pumping Capacity--Hydrogen | 2,500.00 l/s (5,297.73 CFM) |
Accessories | Require compressor for operation (not included) |
Other Information | APPLIED P/N 0190-03794
- Regeneration valve DN 40 KF
- Capacity for Ar: 1800bar x L
- Capacity for H2 at 10E-6 mbar: 16 bar x L
- Capacity for H2O: 190 bar x L
- Max. pumping speed for Ar/N2: 14 mbar x L/s (840 sccm)
- Max. pumping speed for H2: 6 mbar x L/s (360 sccm)
- Crossover value: 210 mbar x L (160 Torr x L)
- Recovery time from 10 mTorr to < 5 x 10E-7 Torr: Regeneration times:
- Fast regeneration (cold to cold, 2nd stage at 20 K) < 50 min
- Total regeneration (cold to cold, 2nd stage at 20 K) < 170 min
- Warm-up from operating temperature to 300 K < 30 min
- Cool-down from 300 K up to operating temperature < 80 min
- Fast regeneration cycles between total regeneration > 50
- Noise, measured at 1 m (3 ft.) radius from the pump dB(A) < 70
- Heaters 1st stage 160W / 35VAC
- Heaters 2ndstage 90W / 35VAC
- Temperature measurement 1st stage Pt 100
- Temperature measurement 2nd stage Si diode
- Built-in coldhead
|
CE Marked | YES |
Year of Manufacture | 2001 |
Exterior Dimensions | |
Width | 15.000 in (38.1 cm) |
Depth | 24.000 in (61.0 cm) |
Height | 10.000 in (25.4 cm) |
Weight | 66 lb (30 kg) |