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4-inch HFCVD System for CVD Diamond and Related Materials
- Hot Filament CVD system engineered for diamond deposition on a 4 inch (~100mm) rotary platen.
- System design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.
This equipment was previously used for commercial R&D of polycrystalline CVD Diamond materials.
Design employs a 2-zone vertically-oriented filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. External substrate manipulation enables substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species.
Cline Innovations intends to refurbish and reintegrate this system with updated controls and interlocks, likely including PLC process monitoring, LCD display, pneumatic controls, and other features. Tailoring of design to meet customer needs may be possible. Run-off testing is possible prior to shipment.
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