Item ID: 259340

**1 Offered at Best Price**

EVG Lithoscale - Maskless Exposure System

Up to 300mm, Low-Volume Manufacturing, automated substrate handling

Brandnew and unsed System available for an attractive price!

Out of package Hyperion

Technical configuration:

• For maskless exposure of wafer sizes up to 300 mm

• High precision stage including contactless wedge error compensation

• Self calibration via integrated sensors

• Extensibility up to two (2) exposure heads in total for highest throughput

• Separate control unit

• EVG CIM Framework software

• Self diagnostics during machine start up, automatic initialization of all motors, position end switches, sensors and pneumatic

• Inspection available on request

• PC controlled operating environment

• Solid state drive and hard drive for high availability and reliability

• Supported layout format: GDSII

Location: Regensburg, Bavaria

Unit Price	Unstated
Number of Units	1
Manufacturer	EVG
Model	EVG Lithoscale
Description	Maskless Exposure System
Accessories	System is complete and unused.
Other Information	Equipment installed in cleanroom. Original packaging available. Country of origin: Austria
Condition	New-Never Used
Year of Manufacture	2023