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FULL DESCRIPTION of Item 257675

in Other Wafer Production Equipment 		Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 257675

Offered 1 Offered at Best Price


Cluster Tool: TEL ACT12 + Canon FPA- 5500iZ

TEL ACT12 - Double Block - 300mm + LITVC1-02

 Cluster Tool: TEL ACT12 + Canon FPA- 5500iZ
  Click to see additional image(s)... other images

Location: Villach, Kärnten
Unit Price Unstated
Number of Units 1
Manufacturer Canon
Model  LITVC1-02
Description Canon FPA- 5500iZ+
Wafer Size Range 
  Minimum 300 mm
  Maximum 300 mm
  Set Size 300 mm
Other Information 
Block 2:
- 4x Coater Unit (IC Cup)
            - 4 Resist Lines / coater Unit
            - 11 Resist pumps "RGEN01" with Entegris Filter Manifold
            - 1x RRC / EBR nozzle / coater unit
            - Back Rinse Nozzle standard
- 2x adhesion (ADH) unit
- 5x chill plate (CPL)
- 6x standard hot plate (LHP)
- 3x high temperature hot plate (HHP)
- 2x Cup wash holder unit incl. Cup wash disc
- 1x Transfer unit (TRS)
- 1x Transfer chill plate (TCP)
Block 3:
- 4x Developer unit
        - 2 Developer Lines (SH - Nozzle) / unit
        - 1x Rinse Nozzle / unit
        - Back Rinse Nozzle standard
3x chill plate (CPL)
4x chilling hot plate (CHP)
5x standard hot plate (LHP)
Interface Block
- connection Canon iZ Stepper
- 1x WEE unit
- 2x Buffer station
- 1x chill plate (CPL)
Extended Description  Details at Configuration_overview_LITVC1-02_ACT12_E200052_010325.xlsx
Condition Good
Year of Manufacture 2004
Power Requirements 200-208 V     50/60 Hz     3 Phase
CE Marked YES

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria