About Us Contact Us Terms & Conditions
Serving  Our Guest Log in    Register to bid, list, and tradeHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools    View    Search-by-Specs    Input    Edit    

FULL DESCRIPTION of Item 102178

in Silicon Etchers
Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York
 
Item ID: 102178

Offered 1 Offered at Best Price


SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

Silicon Etcher - Year 2003
SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER
  Click to see additional image(s)... other images

Location: Scotia, NY
Unit Price Unstated
Number of Units 1
Manufacturer Surface Tech Sys
Model MXP Multiplex ICP ASE HR
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
  Set Size 150 mm
Process Silicon Etch Bosch Process
Loadlock 
  Loadlock Yes/No YES
  Loadlock Pump Manufacturer & Model Edwards E2M40
High Vacuum Pump Pfeiffer MAG 2000
Roughing Pump Edwards IQMB250 & IQDP80
RF Generator Model ENI/ACG-3B and Advanced Energy RFG 3001
Number of Gas Inputs Four Gas
Process Gases SF6, C4F8, O2, Ar
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model Huber/Unistat 140W
Accessories ICP V2 - Balun coil
Mechanical Clamp
Helium Backside Cooling
Carousel in MkIV MPX - 2 x 150mm wafers
3KW Source
300/30W platen
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2

 

Other Information Windows 2000
Bosch license
Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase
Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase.
CE Marked YES
Year of Manufacture 2003

OFFERED BY: (click name below to visit its website directly)

Capovani Brothers Inc.
Sales
Scotia , New York
1.518.346.8347
 
Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

 


Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York