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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
49690
Advanced Energy  

Advanced Energy  

ATX-600 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY IMPEDANCE MATCHING NETWORK CONTROLLER:

Controller for Impedance Matching Network

Controller for the Advanced Energy Impedance Matching Network.
Matching network is not available.

1   F* Scotia, New York
140340
Advanced Energy  

Advanced Energy  

Apex 3013 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

2   F* Scotia, New York
208186
Advanced Energy  

Advanced Energy  

PEII-10K 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Representative photo

1   F* Scotia, New York
139488
Advanced Energy  

Advanced Energy  

PEII-10K 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Radio Frequency Generator

Representative photo

10   F* Scotia, New York
175885
Advanced Energy  

Advanced Energy  

3152522-001B / RAS Split Inductor 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RAS SPLIT INDUCTOR:

The RAS Split Inductor is designed for use with Advanced Energy PE
or PEII 10 kW (or lower) power supply systems

1   F* Scotia, New York
225628
Advanced Energy  

Advanced Energy  

PE 10K 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY REMOTE MINI-PANEL :

PE 10K Remote Mini-Panel

1   Scotia, New York
1007
Advanced Energy  

Advanced Energy  

LF5 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY :

RF Generator w/Matching Network

Formerly RF Power Products

3   Scotia, New York
190763
Advanced Energy  

Advanced Energy  

RF10S 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1000 WATT 13.56 MHZ:

Radio Frequency (RF) Generator 

Power Supply Part No:  3150014-000 G4 SE

1   Scotia, New York
207153
Advanced Energy  

Advanced Energy  

Apex 1500/13 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1500 W 13.56 HZ:

Radio Frequency Generator

1   F* Scotia, New York
42967
Advanced Energy  

Advanced Energy  

Apex 3513 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 3.5KW:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

1   F* Scotia, New York
3464
Advanced Energy  

Advanced Energy  

PDX9002V 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF PLASMA GENERATOR POWER SUPPLY 900W, 350 KHZ:

RF Plasma Generator

2 2,600.70 F* Scotia, New York
87228
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1   F* Plano, TX
87656
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

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Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1   Plano, TX
180513
Applied Materials  

Applied Materials  

3750-01129 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT 3750-01129:
  • This is a brand new microwave waveguide component.
1   Leominster, Massachusetts
184652
Applied Materials  

Applied Materials  

FI20104 (3750-01111) 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Leominster, Massachusetts
199844
Applied Materials  

Applied Materials  

FI20099 

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in Plasma Processing Equipment

AMAT Water-Cooled Dummy Load:
  • This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
1   Leominster, Massachusetts
215272
Applied Materials  

Applied Materials  

0190-02099 / 001 

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AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Only 1 in inventory.  Photos provided upon request.
1 425.11 Leominster, Massachusetts
248647
Applied Materials  

Applied Materials  

Centura 

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AMAT, Centura, 200mm, S/N 302958:

AMAT, Centura, 200mm, S/N 302958

Metal Etch. No loadports included.

1   N* Singapore
87948
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS CONTROLLER:

Controller

1   Scotia, New York
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS SYSTEM ELECTRONICS RACK:

System Electronics Rack

1   Scotia, New York
114961
Advanced Plasma Syst  

Advanced Plasma Syst  

B Series-4 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM. :

Plasma Treatment System
Desmear/Etchback


Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
Both companies merged and are an entity of Nordson - now called Nordson MARCH.

1   F* Scotia, New York
165746
MKS Instruments, Inc  

MKS Instruments, Inc  

FI20166 (3750-01147) 

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Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Repair should be possible. One option is to coordinate MKS factory repair in conjunction with the sale.
1   Leominster, Massachusetts
183180
MKS Instruments  

MKS Instruments  

FI20634 

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Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
1   Leominster, Massachusetts
213304
MKS Instruments, Inc  

MKS Instruments, Inc  

Astex 1.0kW AX3060 

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Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
1   Leominster, Massachusetts
211656
MKS Instruments, Inc  

MKS Instruments, Inc  

AX3060-1 for AX2115 

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Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
1   Leominster, Massachusetts
225956
Astex  

Astex  

2.5kW 

List all items of this typeRadio Frequency (RF) Generators

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Astex 2.5kW switching microwave generator set:
  • The complete tested, refurbished 2.5kw microwave generator set includes:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator.
    • All interconnecting cables for the above components.
  • Operational and ready to ship with relatively short lead-time. 
  • Limited warranty can be considered depending on the application.
1   Leominster, Massachusetts
203295
MKS Instruments, Inc  

MKS Instruments, Inc  

FI20608, Fl20608 

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ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
3   F* Leominster, Massachusetts
209065
Astex  

Astex  

FI20131 Fl20131 3750-01139 

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Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
2   Leominster, Massachusetts
213180
Astex  

Astex  

AX2518 

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ASTeX AX2518 SmartPower Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2   Leominster, Massachusetts
165749
Astex  

Astex  

AX3153 

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Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
1   Sterling, Massachusetts
165748
Astex  

Astex  

AX3153-1 

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Astex AX3153-1 Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
  • One used, microwave-tested unit is in Cline Innovations' physical inventory as of 8/20/2021.
1   Sterling, Massachusetts
63666
Astex  

Astex  

AX 7610 

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ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:

Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112

2   Scotia, New York
165750
Astex  

Astex  

CS2 

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Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
1   Sterling, MA
190326
Astex  

Astex  

CS340 or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

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Astex CS340 3-way Circulator :
  • Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
  • Equipped with a reflected power coupler at Port 3 (dummy load location).
1   Leominster, Massachusetts
168802
Astex  

Astex  

HS 

List all items of this typeRadio Frequency (RF) Generators

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Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, Massachusetts
168804
Astex  

Astex  

HS-1000, HS1000 

List all items of this typeRadio Frequency (RF) Generators

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Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, MA
168803
Astex  

Astex  

HS-1500, HS1500 

List all items of this typeRadio Frequency (RF) Generators

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Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, MA
206579
Astex  

Astex  

SXRHA 

List all items of this typeRadio Frequency (RF) Generators

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ASTEX MAGNETRON HEAD:

Magnetron Head

2   Scotia, New York
85963
Astex  

Astex  

AX3041 

List all items of this typePlasma Processing Equipment and Tools - Other

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ASTEX THREE STUB TUNER:

Three Stub Tuner

1 1,200.32 Scotia, New York
165710
Astex  

Astex  

Model LS or Equivalent/Substitute 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
1   Sterling, Massachusetts
190257
Astex  

Astex  

CPR340 or equivalent 

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Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
1   Leominster, Massachusetts
184611
Astex  

Astex  

LS340 

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Astex WR340 Water-Cooled Dummy Load:
  • Heat exchanger designed for use with 2.45GHz 5kW AX2040 & A-5000 microwave delivery subsystems used in applications with well-controlled reflected power levels.
1   Leominster, Massachusetts
427
Balzers  

Balzers  

RFS 302 

List all items of this typeRadio Frequency (RF) Generators

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BALZERS RF POWER SUPPLY:

RF Power Supply

1   Scotia, New York
139078
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson / IPC 4055/2:
Plasma Surface Treatment Tool
1   Plano, TX
154299
Branson/IPC  

Branson/IPC  

3000C 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

1   Plano, TX
191696
Branson/IPC  

Branson/IPC  

4000 Series 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON BARREL PLASMA ASHER & ETCHER:

Barrel Plasma Asher/Etcher

1   Scotia, New York
126550
Branson/IPC  

Branson/IPC  

P3075/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON BARREL RESIST STRIPPER:

Barrel Resist Stripper

Branson P3075/2

1   F* Scotia, New York
189210
Branson/IPC  

Branson/IPC  

4155/2 

List all items of this typeBarrel Resist Strippers

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BRANSON PLASMA ASHER/ETCHER:

Plasma Asher/Etcher

1   Scotia, New York
223494
Branson/IPC  

Branson/IPC  

P2100 

List all items of this typeBarrel Resist Strippers

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BRANSON PLASMA STRIPPER 1250 WATT:

Plasma Resist Stripper 

Quartz Barrel - Solid State RF Generator

1   Scotia, New York
189241
Branson/IPC  

Branson/IPC  

7102 

List all items of this typeBarrel/Box Plasma Etchers

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BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT:

Plasma Etcher

1   F* Scotia, New York
152146
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Surface Treatment Tool
1   F* Plano, TX
152147
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Treatment Surface Tool
1   F* Plano, TX
49911
Branson/IPC  

Branson/IPC  

S-3100 

List all items of this typeBarrel Resist Strippers

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Branson/IPC S-3100:
Plasma Barrell Stripper, 12" x 20" Quartz
1   Plano, TX
152145
Branson/IPC  

Branson/IPC  

Series 4000 

List all items of this typeBarrel Resist Strippers

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Branson/IPC Series 4000:

Plasma Barrel Stripper

Plasma Asher / Cleaner System

1   Plano, Texas
196069
Cober  

Cober  

6kW microwave tuner 

List all items of this typePlasma Processing Equipment and Tools - Other

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Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1   Leominster, Massachusetts
168904
Cober  

Cober  

ST89-1019 

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Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1   Leominster, Massachusetts
43020
Comdel  

Comdel  

CPS-5000/13.56 

List all items of this typeRadio Frequency (RF) Generators

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COMDEL RADIO FREQUENCY GENERATOR POWER SUPPLY:

Radio Frequency Generator

1 9,502.55 Scotia, New York
248648
Gasonics  

Gasonics  

PEP-4800DL 

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Concept Part Solutions, Inc., PEP-4800DL, 200mm, S/N M860260:

Concept Part Solutions, Inc., PEP-4800DL, 200mm, S/N M860260

No loadports included.

1   N* Singapore
197423
Connecticut Microwav  

Connecticut Microwav  

366004 

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Connecticut Microwave Dual-Directional Coupler:
  • 60 dB ports
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Round-flange connections [likely UG53/U  specification]
  • Photos provided upon request.
1   Leominster, Massachusetts
231089
Daihen  

Daihen  

FGA-50B, DMU-01G 

List all items of this typeRadio Frequency (RF) Generators

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DAIHEN AMAT Water Cooled RF Generator 5000W 40.68MHz 50/60Hz:

RF Generator New Surplus

Applied Materials P/N 0191-71542

2   Scotia, New York
230846
Daihen  

Daihen  

RGA-50J3, DMU-01G 

List all items of this typeRadio Frequency (RF) Generators

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DAIHEN WATER COOLED RF GENERATOR 5000W 13.56MHZ:

RF Generator New Surplus

 

12   Scotia, New York
223580
Advanced Energy  

Advanced Energy  

Cesar 4020 

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DRESSLER ADVANCED ENERGY 2000W 40.68 MHz RF GENERATOR:

RF Generator

 

1   Scotia, New York
248240
Ebara  

Ebara  

F-REX300 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   East Fishkill, New York
1001
ENI  

ENI  

PL3 

List all items of this typeRadio Frequency (RF) Generators

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ENI POWER SYSTEMS PLASMALOC 3 RF GENERATOR POWER SUPPLY:
Plasmaloc 3 RF Generator
1   Scotia, New York
102336
ENI  

ENI  

OEM 12B 

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ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ:

Radio Frequency Generator

Acquired by MKS Instruments

Representative photo

1   Scotia, New York
151365
ENI  

ENI  

OEM 12A 

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ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ:

Radio Frequency Generator

3   Scotia, New York
185506
ENI Power Systems  

ENI Power Systems  

OEM-6AM-1B-21251 

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ENI POWER SYSTEMS RF POWER SUPPLY 13.56 MHz:

RF Generator

3   Scotia, New York
993
ENI  

ENI  

LPG12A-21051-50 

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ENI POWER SYSTEMS SOLID STATE RF GENERATOR POWER SUPPLY:

Solid State RF Generator

4 2,500.67 F* Scotia, New York
244283
FEI  

FEI  

Helios NanoLab 1200HP 

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FEI, Helios NanoLab 1200HP, sn: 9921505, Failure Analysis:

FEI, Helios NanoLab 1200HP, sn: 9921505, Failure Analysis

1   Malta, New York
184653
Astex  

Astex  

FI20170 (0760-01028) AMAT Ulvac 

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FI20170 Water-Cooled Circulator with Integrated Coupler:
  • This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM equipment.  
  • Goods may also be compatible with Astex subsystems for non-OEM applications.  Please contact Cline Innovations for more information.
1   Sterling, Massachusetts
215261
Gerling  

Gerling  

p/n 910677 c/n 403081 

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Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
1   Leominster, Massachusetts
197421
Gerling  

Gerling  

GL401A 

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Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
1   Leominster, Massachusetts
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

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High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  The assembly example in the image is available for sale as of 5/7/2020.
  • Please contact Cline Innovations to discuss your needs.
1   Leominster, Massachusetts
204280
Hitachi  

Hitachi  

M-8190XT 

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Hitachi, M-8190XT, 300mm, Plasma Etch:

Hitachi, M-8190XT, 300mm, Plasma Etch

3 Chambers

In Fab, Warm Idle

1   Malta, New York
142856
Japan Radio Co.  

Japan Radio Co.  

NAH-1030-2A/NFC-30-2A 

List all items of this typeRadio Frequency (RF) Generators

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JAPAN RADIO CO. RF GENERATOR/MATCHING NETWORK:

RF Generator/Matching Network

2   Scotia, New York
239809
LAM Research Corp.  

LAM Research Corp.  

2300 

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LAM 2300 Mainframe:

›1 x AC Rack

›1 x Atmospheric transfer module

›1 x Vacuum transfer module

›3 x Loadports (Ergo 200mm)

1   Villach, Carinthia
34890
LAM Research Co  

LAM Research Co  

490 AUTO ETCH 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

LAM RESEARCH SIX INCH NITRIDE ETCHER:

Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.

1   F* Scotia, New York
219677
LAM Research Corp.  

LAM Research Corp.  

INOVA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

LAM, INOVA, 300mm, S/N 007823-0389:

LAM, INOVA, 300mm, S/N 007823-0389

1   Malta, New York
245286
LAM Research Corp.  

LAM Research Corp.  

Rainbow 4428 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

LAM, Rainbow 4428, 200mm, S/N 3533 :

LAM, Rainbow 4428, 200mm, S/N 3533 

1   Singapore
245285
LAM Research Corp.  

LAM Research Corp.  

TCP9408SE 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

LAM, TCP9408SE, 200mm, S/N 4545:

LAM, TCP9408SE, 200mm, S/N 4545

1   Singapore
108528
March Instruments  

March Instruments  

PM-600 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT:

Barrel Plasma Etcher with Vacuum Pump
March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.

1   F* Scotia, New York
51482
March Instruments  

March Instruments  

SUPERPLASMOD 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

MARCH INSTRUMENTS PLASMA CLEANER:

Plasma Cleaner with 300W Power Supply

2   F* Scotia, New York
177136
March Instruments  

March Instruments  

PX-2400 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz:
Box Plasma Etcher

Applications
"Gas plasma treatment provides a fast, efficient method for
surface treatment and cleaning prior to wire bonding, die
attach, encapsulation, conformal coating and other processes.
Plasma processing enhances lamination bondstrength, improves
wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

1   Scotia, New York
199963
March Instruments  

March Instruments  

PX-500 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHZ:

Box Plasma Etcher

1   F* Scotia, New York
241157
Mattison  

Mattison  

MILLIOS HVM 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Mattson, MILLIOS HVM, 300mm, s/n: 11043001, 09130001, 09250001:

Mattson, MILLIOS HVM, 300mm, s/n: 11043001, 09130001, 09250001

1   Malta, New York
59142
Metroline  

Metroline  

M4L 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

METROLINE BOX PLASMA ETCHER:

Box Plasma Etcher

1   F* Scotia, New York
214758
Applied Materials  

Applied Materials  

FI20064  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Microwave Phase Mag Detector :
  • One unit in inventory. 
  • Please inquire for details, photos, etc.
1   Leominster, Massachusetts
220461
MKS Instruments, Inc  

MKS Instruments, Inc  

FI20161-1 Fl20161-1 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, Massachusetts
220462
MKS Instruments, Inc  

MKS Instruments, Inc  

FI20161 Fl20161 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, Massachusetts
213290
MKS Instruments, Inc  

MKS Instruments, Inc  

SM445.0 SM-445 SM445 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

1   F* Leominster, Massachusetts
184616
MKS Instruments  

MKS Instruments  

AX2530PPD or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1   Leominster, Massachusetts
237494
MKS Instruments, Inc  

MKS Instruments, Inc  

AX2560PPD or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex 6kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1   Leominster, Massachusetts
223137
MKS Instruments, Inc  

MKS Instruments, Inc  

FI20164 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
1   Leominster, Massachusetts
236650
Muegge  

Muegge  

MW1003A-210EC 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Muegge 3kW Water-Cooled Microwave Isolator:
  • Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • All necessary 6mm metric fasteners.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with a known power sensitivity (dB rating).
  • Additional photos taken on 12/13/2022 are available upon request.
1   Leominster, Massachusetts
203376
National Electronics  

National Electronics  

WR340TUNERA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
1   Leominster, Massachusetts
196788
National Electronics  

National Electronics  

YJ 1600, YJ-1600 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of several YJ1600 magnetron tubes.  Tube ages and conditions vary.
  • Warranty can be considered depending on application/use details.
  • In general, tubes will be tested at Cline Innovations prior to sale unless negotiated otherwise.
1   Leominster, Massachusetts
143041
National Electronic  

National Electronic  

MH3.OW-SL 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

NATIONAL ELECTRONICS/RICHARDSON MICROWAVE MAGNETRON HEAD:

Microwave Magnetron Head

2   Scotia, New York
239647
Novellus Systems  

Novellus Systems  

INOVA NEXT 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm:

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm

1   Malta, New York
203278
MKS Instruments, Inc  

MKS Instruments, Inc  

3750-01145 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OEM Water-Cooled Dummy Load:
  • One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
  
  
  
  
  
  
  
  

 

1   Leominster, Massachusetts
244285
Oxford Instruments  

Oxford Instruments  

OPAL 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool:

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool

1   Malta, New York
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Processing Equipment:
Advanced Energy, Advanced Plasma System, Inc., Applied Materials, Inc., Astex, Axcelis/Eaton, Balzers, Branson/IPC, Cober, Comdel, Connecticut Microwave, Daihen, Ebara, ENI Power Systems, FEI, Gasonics, Gerling, Hitachi, Japan Radio Co., LAM Research Corp., March Instruments, Mattison, Metroline, MKS Instruments, Inc., Muegge, National Electronic, National Electronics, Novellus Systems, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, Sairem, Seren, SOLVISION, SPI Supplies, Surface Technology Systems, Technics, Tepla, Tokyo Electron Limited, Trion Technology, Ulvac, Waveline, Yield Engineering Systems