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ALL CATEGORIES   Metrology Eq   Resistivity Testers

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Item ID: 247845

1 Offered at $ 80,000.00 KLA-Tencor Auto RS-55tc Resistivity Test Tool KLA-TENCOR Auto RS-55tc Resistivity Mapping System Accommodates all Wafer Sizes from 50mm – 200mm 5 Megaohm/sq Measurement Range Typical Measurement Time: 5 – 4.5 Seconds per Test Site <0.2% (1 sigma) Measurement Repeatability Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC PC Based System Controller 25 MHz 486 Based MPU 44 MB Removable Hard Disk 110 MB Fixed Hard Disk Drive 5” Floppy Disk Drive X-Y Map: Up to 1200 Sites Programmable Probe Qualification: 20 sites 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)

Location: Austin, Texas

Unit Price	$ 80,000.00
Number of Units	1
Manufacturer	KLA-Tencor
Model	Auto RS-55tc
Wafer Size Range
Minimum	50 mm
Maximum	200 mm
Set Size	200 mm
Cassette to Cassette	YES
Wafer Handling	Standard Robot
Resistivity Testing	YES
Sheet Resistance Testing	YES
Thickness Testing	YES
Dopant Typing	YES
Wafer Mapping	YES
Controller Type	PC/VME
Refurbished	YES
Condition	Excellent

OFFERED BY:

(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas
+1.972.943.0808

 

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