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Cluster Plasma Tools


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List all 6 product types under Cluster Plasma ToolsList all 6 product types under Cluster Plasma Tools


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
187746
Applied Materials  

Applied Materials  

AMAT Enabler chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

2   F* Dresden, Saxony
2x AMAT Enabler chamber:

ETC380-02-B und ETC380-05-D
AMAT Enabler chamber manufactured 12/2002 und 03/2007

187744
Applied Materials  

Applied Materials  

AMAT Axiom strip chamber  

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT Axiom strip chamber :
AMAT Axiom strip chamber
187742
Applied Materials  

Applied Materials  

AMAT Centura Rev.4 for 12 " 

List all items of this typeCluster Plasma Tools - Silicon

in Cluster Plasma Tools

1   F* Regensburg, BY
AMAT Centura Rev.4:
AMAT Centura Rev.4
Serial Number: 40 99 39 


AMAT Centura Rev.4 
Serial Number: 40 99 39 
Equipment Code: ETC320-05
AMAT Centura Rev.4;
300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports
187743
Applied Materials  

Applied Materials  

AMAT eMax CT chamber  

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT chamber :
AMAT eMax CT chamber
187745
Applied Materials  

Applied Materials  

AMAT eMax CT plus chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT plus chamber:
AMAT eMax CT plus chamber manufactured 12/2002
187747
Applied Materials  

Applied Materials  

AMAT eMax CT plus chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT plus chamber:
AMAT eMax CT plus chamber manufactured 12/2002
137536
Tokyo Electron Ltd  

Tokyo Electron Ltd  

TEL Certas WING for 12" / 300 mm 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   F* Regensburg, BY
TEL Certas WING:
TEL Certas WING
300mm TEL Certas WING mainframe with 3 load ports
Equipment Code: ETC380-41


300mm TEL Certas WING mainframe with 3 load ports
Serial Number: WM0002
119294
Trion Technology  

Trion Technology  

Oracle 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   F* Scotia, NY
TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:
Dielectric Cluster Tool


Trion Technology Oracle
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

1   F* Scotia, NY
ULVAC FERROELECTRIC ETCHER:
Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.



*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Cluster Plasma Tools:
Applied Materials, Inc., Tokyo Electronics Limited, Trion Technology, Ulvac