Serving  Our Guest Log in    Register to bid, list, and tradeHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   View   Search-by-Specs    Input    Edit    
View All Offers Under

Plasma Etch Equipment


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group Offers into sub-categories under Plasma Etch EquipmentGroup Offers into sub-categories under Plasma Etch Equipment

List all 13 product types under Plasma Etch EquipmentList all 13 product types under Plasma Etch Equipment


  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
187746
Applied Materials  

Applied Materials  

AMAT Enabler chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

2   F* Dresden, Saxony
2x AMAT Enabler chamber:

ETC380-02-B und ETC380-05-D
AMAT Enabler chamber manufactured 12/2002 und 03/2007

187744
Applied Materials  

Applied Materials  

AMAT Axiom strip chamber  

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT Axiom strip chamber :
AMAT Axiom strip chamber
187742
Applied Materials  

Applied Materials  

AMAT Centura Rev.4 for 12 " 

List all items of this typeCluster Plasma Tools - Silicon

in Cluster Plasma Tools

1   F* Regensburg, BY
AMAT Centura Rev.4:
AMAT Centura Rev.4
Serial Number: 40 99 39 


AMAT Centura Rev.4 
Serial Number: 40 99 39 
Equipment Code: ETC320-05
AMAT Centura Rev.4;
300mm AMAT Centura Rev.4;
with 2 Load Locks and 2 Load Ports
187743
Applied Materials  

Applied Materials  

AMAT eMax CT chamber  

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT chamber :
AMAT eMax CT chamber
187745
Applied Materials  

Applied Materials  

AMAT eMax CT plus chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT plus chamber:
AMAT eMax CT plus chamber manufactured 12/2002
187747
Applied Materials  

Applied Materials  

AMAT eMax CT plus chamber 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   Dresden, Saxony
AMAT eMax CT plus chamber:
AMAT eMax CT plus chamber manufactured 12/2002
87948
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
APPLIED MATERIALS CONTROLLER:
Controller
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
APPLIED MATERIALS SYSTEM ELECTRONICS RACK:
System Electronics Rack
114961
Advanced Plasma Syst  

Advanced Plasma Syst  

B Series-4 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   F* Scotia, NY
APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM. :
Plasma Treatment System
Desmear/Etchback


Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
Both companies merged and are an entity of Nordson - now called Nordson MARCH.
91265
PlasmaQuest  

PlasmaQuest  

357 ECR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   F* Scotia, NY
ASTEX PLASMAQUEST ECR PLASMA ETCHER:
ECR Plasma Etcher

Nexx Systems LLC. has acquired PlasmaQuest
189241
Branson/IPC  

Branson/IPC  

7102 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1 22,000.00 F* Scotia, New York
BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT:
Plasma Etcher
33250
Drytek  

Drytek  

384T 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Plano, TX
Drytek 384T:
Plasma Metal Etcher
90316
LAM Research Corp.  

LAM Research Corp.  

4420 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

2   F* Scotia, NY
LAM RESEARCH 8" POLYSILICON ETCH TOOL :
8" Polysilicon Etch Tool
34890
LAM Research Co  

LAM Research Co  

490 AUTO ETCH 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

1   Scotia, New York
LAM RESEARCH SIX INCH NITRIDE ETCHER:
Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.
4901
LFE Corp  

LFE Corp  

PDS-504 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   Plano, TX
LFE PDS-504:
Plasma Barrel Etcher
108528
March Instruments  

March Instruments  

PM-600 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   F* Scotia, New York
MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT:
Barrel Plasma Etcher with Vacuum Pump
March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.
181705
March Instruments  

March Instruments  

Jupiter III 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
MARCH INSTRUMENTS REACTIVE ION ETCHER:
Table Top Reactive Ion Etch System

March Jupiter 3
177136
March Instruments  

March Instruments  

PX-2400 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   F* Scotia, NY
MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz:
Box Plasma Etcher

Applications
"Gas plasma treatment provides a fast, efficient method for
surface treatment and cleaning prior to wire bonding, die
attach, encapsulation, conformal coating and other processes.
Plasma processing enhances lamination bondstrength, improves
wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

187749
March Instruments  

March Instruments  

PX-1000 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   F* Scotia, NY
MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHz:
Box Plasma Etcher

Applications
"Gas plasma treatment provides a fast, efficient method for
surface treatment and cleaning prior to wire bonding, die
attach, encapsulation, conformal coating and other processes.
Plasma processing enhances lamination bondstrength, improves
wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

93394
Oxford Instruments  

Oxford Instruments  

Plasmalab 80 Plus 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM:
Reactive Ion Etch System
55400
Plasma-Therm  

Plasma-Therm  

WAF'R BATCH 74 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Plano, TX
PLASMA THERM WAF'R BATCH 74:
Parrell Plasma Etcher
1220
Plasma-finish  

Plasma-finish  

V15G 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   Scotia, New York
PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT:

Plasma Box Etcher System

PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:
Plasmatherm RIE/Plasma Etch System
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:
Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:
Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:
Combination Plasma Deposition System/RIE
165893
PlasmaQuest  

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

1   F* Sterling, MA
PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
  • Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
  • Configured with 2 modules including power & controls rack and vacuum module.
  • System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
  • Computer controller may function, but upgrade likely to be best option.
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMATHERM ICP PLASMA ETCHER:
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMATHERM REACTIVE ION ETCH SYSTEM 11":
Reactive Ion Etch System - 11" Electrode
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:
Reactive Ion Etch System
11" Electrode
Year 1998
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:
Shuttle Load Lock System
64739
STS Systems  

STS Systems  

320PC 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Plano, TX
STS 320PC RIE Etcher:
Reactive Ion Etch System
84296
Surface Tech Sys  

Surface Tech Sys  

308 PC 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   Scotia, NY
STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT:
Barrel Plasma Etcher
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Scotia, NY
SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:
Chlorine Etcher - Year 2003
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:
Silicon Etcher - Year 2003
184779
Technics  

Technics  

Micro Stripper -- Series 200 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:
Technics Micro Stripper Series 200 Plasma System

23991
Tegal  

Tegal  

411 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   Plano, TX
Tegal 411:
Plasma Barrel Stripper
137536
Tokyo Electron Ltd  

Tokyo Electron Ltd  

TEL Certas WING for 12" / 300 mm 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   F* Regensburg, BY
TEL Certas WING:
TEL Certas WING
300mm TEL Certas WING mainframe with 3 load ports
Equipment Code: ETC380-41


300mm TEL Certas WING mainframe with 3 load ports
Serial Number: WM0002
181401
Tepla  

Tepla  

4011 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

1   F* Scotia, NY
TEPLA PLASMA ETCHER 4000 WATT:
Planar Plasma Etcher
28517
Trion Technology  

Trion Technology  

Minilock 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Plano, TX
Trion Minilock RIE Plasma Etcher:
RIE Single Wafer Plasma Metal Etcher
119294
Trion Technology  

Trion Technology  

Oracle 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   F* Scotia, NY
TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:
Dielectric Cluster Tool


Trion Technology Oracle
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

1   F* Scotia, NY
ULVAC FERROELECTRIC ETCHER:
Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.



*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Etch Equipment:
Advanced Plasma System, Inc., Applied Materials, Inc., Branson/IPC, Drytek, LAM Research Corp., LFE Corp, March Instruments, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, STS Systems, Surface Technology Systems, Technics, Tegal, Tepla, Tokyo Electronics Limited, Trion Technology, Ulvac