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LPCVD Furnaces


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List all 3 product types under LPCVD FurnacesList all 3 product types under LPCVD Furnaces


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, NY
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
137544
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Celsior mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Celsior mainframe
Aviza Celsior mainframe



Aviza Celsior mainframe
Equipment Code: CVD304-04

LOCATION: Dresden
137540
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Pantheon Mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Pantheon Mainframe
Aviza Pantheon Mainframe
Equipment Code: CVD304-03


Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
137566
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (NITRID) for 12" / 300 mm 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Furnace TEL Minibatch (NITRID)
OfenTel Minibatch (NITRID)
Equipment Code: OFE361-01

TEL Formula Minibatch furnace for Nitride, 4


OfenTel Minibatch (NITRID)
Serial Number: P00000315001
137567
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (OXID) for 12" / 300 mm 

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in LPCVD Furnaces

1   F* Regensburg, BY
FurnaceTel Minibatch (OXID)
OfenTel Minibatch (OXID)
Equipment Code: OFE361-02

TEL Formula Minibatch furnace for Oxide


OfenTel Minibatch (OXID)
Serial Number: P00000315002
190993
Kokusai  

Kokusai  

Quixace Ultimate 

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in LPCVD Furnaces

1   F*N* Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

190748
Kokusai  

Kokusai  

DJ-1236VN-DF 

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in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N T2DC6-16590

ALD TiN

Tool is New In Box, with New Quartz.  Never installed.
190749
Kokusai  

Kokusai  

DJ-1236VN-DF 

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in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N: T2DC6-16595

ALD TiN
180506
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, SN
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

S/N: T2DC6-15901
190750
Kokusai  

Kokusai  

DD-1223VN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN
Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441
186717
Kokusai  

Kokusai  

DJ-853V 

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in LPCVD Furnaces

1   F* Singapore,
Kokusai, 200mm, DJ-853V, LPCVD SiN S
Kokusai, 200mm, DJ-853V, LPCVD SiN 

189077
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 AP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace
SVG, AVP 8000 AP, 200mm Vertical Furnace

Padox/Sacri-Ox

Bagged & Skidded in Warehouse


188435
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 AP 

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in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

Padox/Sacri-Ox

S/N: 4318
188431
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 AP 

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in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace
SVG, AVP 8000 AP, 200mm Vertical Furnace
Cu Anneal




S/N 4250
191257
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Forming Gas Anneal 

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in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal
SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal

S/N: 4437
191913
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 AP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

Bagged & Skidded in Warehouse


188432
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Nitride-Pad/SPCR (Gen Nit)


S/N: 4359

188433
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Nitride-Pad/SPCR (Gen Nit)


S/N: 4434

 

188434
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Nitride-ONO

S/N: A10078
188436
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 AP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

Padox/Sacri-Ox

S/N: 4404
188481
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Poly (Plain Poly)

S/N: 4302
188482
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Plain Poly

S/N: A10092
188483
Aviza Technology Ltd  

Aviza Technology Ltd  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD TEOS

S/N: 4436
189132
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Nitride-Pad/SPCR (Gen Nit)

Bagged & Skidded in warehouse
191270
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP, SiN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD SiN
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Nitride-Pad/SPCR (Gen Nit)

S/N: 4321
187658
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

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in LPCVD Furnaces

1   Singapore,
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

S/N: 300009675379

In the Fab in Singapore
190746
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

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in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2
TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2
190747
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

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in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2

TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2

178714
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
TEL Indy, Vertical Furnace, 300mm
PSZ (Poly-Silazane) Cure Furnace, 300mm
Heater: FTP VOS-56-101P 4zone / RT-1100 (C) / with RCU
Process Condition: AP+Sub-AP
MAX Operating Temp: 900degC

137543
TEL Corp.  

TEL Corp.  

TEL Trias TI/TiN-ALD for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
TEL Trias TI/TiN-ALD
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-01


TEL Trias TI/TiN-ALD
Serial Number: C10503
189682
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S 

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in LPCVD Furnaces

1   Singapore,
TEL, Aplha 8 S, 200mm, Vertical Furnace, Doped Poly
TEL, Aplha 8 S, 200mm, Vertical Furnace,  Doped Poly

S/N: 300009645188


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under LPCVD Furnaces:
ASM, Aviza Technology Ltd., Kokusai, Silicon Valley Group, TEL Corp., Tokyo Electronics Limited