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Thermal Processing Equipment


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List all 12 product types under Thermal Processing EquipmentList all 12 product types under Thermal Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
3502
AG Associates  

AG Associates  

2101 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates 2101:
Rapid Thermal Processing System for 3"-5" Wafers
3322
AG Associates  

AG Associates  

2106 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates 2106:
Rapid Thermal Processing System
189869
AG Associates  

AG Associates  

610 

List all items of this typeBenchtop RTP Tools

in Rapid Thermal Processing Equipment

1   Plano, Texas
AG Associates 610 Rapid Thermal Processor:
AG Associates 610 Rapid Thermal Processor
  • Benchtop System for up to 6" Wafers
  • PCAT Control System
111094
AG Associates  

AG Associates  

210M 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 210M:
Rapid Thermal Implant Monitor
49891
AG Associates  

AG Associates  

Heatpulse 2146 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 2146:
Single Chamber Rapid Thermal Processor PARTS TOOL ONLY
51726
AG Associates  

AG Associates  

410 Controller Only 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Plano, TX
AG Associates Heatpulse 410:
CONTROLLER ONLY
42890
AG Associates  

AG Associates  

2146 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Scotia, NY
AG ASSOCIATES SINGLE CHAMBER RTP TOOL:
Single Chamber RTP Tool
195352
Applied Materials  

Applied Materials  

Centura ACP Radiance RP 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   F* Taichung, Taichung City
Applied Materials, Centura RTP, ISSG, 2ch Radiance RP, 300mm:
Applied Materials, Centura RTP, ISSG, 2ch Radiance RP,  300mm

S/N : 408166


183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, NY
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
137544
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Celsior mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Celsior mainframe:
Aviza Celsior mainframe



Aviza Celsior mainframe
Equipment Code: CVD304-04

LOCATION: Dresden
137540
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Pantheon Mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Pantheon Mainframe:
Aviza Pantheon Mainframe
Equipment Code: CVD304-03


Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
137566
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (NITRID) for 12" / 300 mm 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Furnace TEL Minibatch (NITRID):
OfenTel Minibatch (NITRID)
Equipment Code: OFE361-01

TEL Formula Minibatch furnace for Nitride, 4


OfenTel Minibatch (NITRID)
Serial Number: P00000315001
137567
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (OXID) for 12" / 300 mm 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
FurnaceTel Minibatch (OXID):
OfenTel Minibatch (OXID)
Equipment Code: OFE361-02

TEL Formula Minibatch furnace for Oxide


OfenTel Minibatch (OXID)
Serial Number: P00000315002
133149
Kokusai  

Kokusai  

2950704 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
KOKUSAI DIFFUSION FURNACE TUBE:
Horizontal Diffusion Furnace Tube
Unused Surplus


Kokusai 2950704
190993
Kokusai  

Kokusai  

Quixace Ultimate 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

190748
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N T2DC6-16590

ALD TiN

Tool is New In Box, with New Quartz.  Never installed.
190749
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N: T2DC6-16595

ALD TiN
180506
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, Saxony
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF:
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

PUMPS INCLUDED.  See Photo attached.

S/N: T2DC6-15901
194725
Kokusai  

Kokusai  

DD-1206V-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
Kokusai Quixace, 300mm, DD-1206V-DF:
Kokusai Quixace, 300mm, DD-1206V-DF

LP SiN 

S/N : T2DC6-13303

!!! MULTIPLE UNITS AVAILABLE !!!  Please inquire
195691
Kokusai  

Kokusai  

DD-1206VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai Quixace, 300mm, DD-1206VN-DF:
Kokusai Quixace, 300mm, DD-1206VN-DF

Oxidation Furnace

S/N: T2DD6-17510

Bagged & Skidded in Warehouse
195692
Kokusai  

Kokusai  

DD-1206VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai Quixace, 300mm, DD-1206VN-DF:

Kokusai Quixace, 300mm, DD-1206VN-DF

S/N : T2DD6-17098

195693
Kokusai  

Kokusai  

 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai Quixace, 300mm, DD-1206VN-DF:

Kokusai Quixace, 300mm, DD-1206VN-DF

S/N : T2DD6-16873-1


195694
Kokusai  

Kokusai  

DD-1206VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai Quixace, 300mm, DD-1206VN-DF:

Kokusai Quixace, 300mm, DD-1206VN-DF

S/N : T2DD6-17766


190750
Kokusai  

Kokusai  

DD-1223VN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN:
Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441
195356
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN

S/N : T1DC6-13301

!!!Multiple Units Available!!!  Please inquire
186717
Kokusai  

Kokusai  

DJ-853V 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai, 200mm, DJ-853V, LPCVD SiN S:
Kokusai, 200mm, DJ-853V, LPCVD SiN 

195492
Levitech  

Levitech  

Levitor RTP 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Malta, New York
Levitech, Levitor RTP, 300mm:
Levitech, Levitor RTP, 300mm
190523
Mattson Technology  

Mattson Technology  

SHS2800SF 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Singapore,
Mattson, SHS2800SF, 200mm, RTP:
Mattson, SHS2800SF, 200mm, RTP

S/N: 97040347

TOOL IS MISSING PARTS.
MISSING PARTS --->>>
Location on ToolDESCRIPTIONQty
Machine frontQuartz tube1
Machine frontPRI robot1
Machine frontPRI aligner1
Machine sideAsyst Indexer 22002
Machine hindPRI robot controller1
Machine hindPRI aligner controller1
Machine hindIPC rack1
Machine rightPWM rack1
Machine hindILC rack1
Machine hindPCU rack1
Below furnacePyrometer1
Machine hindGas box1
AccessoriesAccessories 
157047
Modular Process Tech  

Modular Process Tech  

RTP-600xp 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

1   Plano, TX
MPT (Modular Process Technology) RTP-600xp:
Rapid Thermal Processing System
4856
MRL Industries  

MRL Industries  

1024 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   F* Plano, TX
MRL Industries 1024:
3-Tube Horizontal Diffusion Furnace w/Cantilever Loaders
133147
MRL Industries  

MRL Industries  

400-920047 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
MRL INDUSTRIES DIFFUSION FURNACE TUBE:
Black Max Horizontal Diffusion Furnace Tube
Unused Surplus


MRL Industries 400-920047
91036
MRL Industries  

MRL Industries  

400-918104 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

2 3,500.00 F* Scotia, NY
MRL INDUSTRIES FURNACE TUBE:
Furnace Tube
91174
MRL Industries  

MRL Industries  

400-902959 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 3,500.00 Scotia, NY
MRL INDUSTRIES FURNACE TUBE:
Furnace Tube
191258
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Forming Gas Anneal 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace:

SVG, AVP 8000 AP, 200mm Vertical Furnace

S/N: 4272

Cu Anneal (Single Boat)

191268
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, Gate Ox 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation:
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

Thermal Gate Oxideation furnace

S/N: 4252
191275
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP Poly 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD Poly:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Poly (Plain Poly)

S/N: 4257
191277
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP TEOS 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD TEOS:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD TEOS

S/N: 4425
191274
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Oxidation 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation:
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation

S/N: 4409


187658
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride:
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

S/N: 300009675379

Bagged and skidded in warehouse in Singapore.
189686
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL Alpha 8 S, 200mm, Vertical Furnace, Polysilicon :
TEL Alpha 8 S, 200mm, Vertical Furnace, Polysilicon 

S/N: A00009815018

Bagged & Skidded in Warehouse.
178712
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL Indy +, Vertical Furnace, 300mm:
TEL Indy +, Vertical Furnace, 300mm

LP ALD
194724
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy Plus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL Indy +, Vertical Furnace, 300mm:
TEL Indy +, Vertical Furnace, 300mm


190746
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:
TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2
190747
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:

TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2

178714
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL Indy, Vertical Furnace, 300mm:
PSZ (Poly-Silazane) Cure Furnace, 300mm
Heater: FTP VOS-56-101P 4zone / RT-1100 (C) / with RCU
Process Condition: AP+Sub-AP
MAX Operating Temp: 900degC

137543
TEL Corp.  

TEL Corp.  

TEL Trias TI/TiN-ALD for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
TEL Trias TI/TiN-ALD :
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-01


TEL Trias TI/TiN-ALD
Serial Number: C10503
195347
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp:
TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp

S/N: L00000615007

Known Parts Missing:

qty. 1 Carrier ARM cable line-XS235IO
qty. 1 Carrier ARM cable line-XS232IO
qty. 3 UPS battery, 12V 5.5Ah in series 3, TEL

195346
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure:
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure
195348
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Santa Clara, California
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly:
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly

S/N : L00000735083


189682
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL, Aplha 8 S, 200mm, Vertical Furnace, Doped Poly:
TEL, Aplha 8 S, 200mm, Vertical Furnace,  Doped Poly

S/N: 300009645188
192952
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL, Aplha 8 S, 200mm, Vertical Furnace, LPCVD Doped Poly:
TEL, Aplha 8 S, 200mm, Vertical Furnace, LPCVD Doped Poly

S/N : A00009835236
143599
Thermco  

Thermco  

122688-001 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   Scotia, NY
THERMCO FURNACE TUBE:
Furnace Tube

Thermco 122688-001

Unused surplus

189872
Thermco  

Thermco  

TMX-9000 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   Plano, Texas
Thermco TMX-9000 Furnace Control System:
Thermco TMX-9000 Furnace Control System
  • 4ea Separate Tube Controllers
50992
Canary Technology  

Canary Technology  

CT 3533-130 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1   F* Scotia, NY
THERMCO/TEMPRESS TUBE FURNACE:
Six Pack Tube Furnace consisting of one three stack 4" capable and one 6" capable three stack furnace

Two three stack Thermco furnace banks sharing one laminar flow, bulk head mount, manual pull station with Tempress Model 263 Controllers.
Left side bank was refurbished and upgraded(Canary Tech.) to 150mm capable MRL Black Max heating elements with one year of use.

Furnace will be sold AS IS WHERE IS

3890
Thermtech  

Thermtech  

15310SC 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 6,750.00 F* Scotia, NY
THERMTEC DIFFUSION FURNACE:
Diffusion Furnace
133220
Zircar  

Zircar  

FX2254 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

1 4,200.00 F* Scotia, NY
ZIRCAR HEATER MODULE 1300°C:
Furnace Tube

Zircar HTMOD FX2254


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Thermal Processing Equipment:
AG Associates, Applied Materials, Inc., ASM, Aviza Technology Ltd., Canary Technology, Kokusai, Levitech, Mattson Technology, Modular Process Technology, MRL Industries, Silicon Valley Group, TEL Corp., Thermco, Thermtech, Tokyo Electronics Limited, Zircar