SEMITOOL SPRAY SOLVENT TOOL
Spray Solvent Tool Rhetech Semitool WST 306 MG
Electrochemical deposition systems are specialized equipment used for plating and surface treatment in semiconductor manufacturing. These systems ensure precise layer deposition, boosting device performance and reliability.
Spray Solvent Tool Rhetech Semitool WST 306 MG
Constant Temperature Bath
Semi-Automatic Centrifugal Cleaning System Used for cleaning electronic assemblies Three step process.: Washing, rinsing, drying
Spray Solvent Tool Refurbished by Rhetech in 2000
Photoresist develop/strip, polymer removal, pre-metal deposition cleaning. High speed rinse and dry of wafers, with low particle counts and reduced DI water consumption.
WET Clean Strip (8''tool), Currently the tool still working.
SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;
3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:
Maintank; Chemistry Controller-Dos Wafer Size Range
Minimum: 150 mm
Maximum:150 mm
Set Size: 150 mm
Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;
SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;
Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.
Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.
Wafer Size Range:
Minimum: 200mm
Maximun: 200mm
Set Size: 200mm
Applied Materials Raider Edge ECD Liftoff Tool
Constant Temperature Bath with MicroTemp Series Process Controller QA Series
Process Tank/Heater/Process Controller Compatible with sulphuric, nitric or acetic acids, various strippers even KOH and HF.
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