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Cluster PECVD Tools


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  • Item IDPhotoItem DescriptionSize RangeChambersProc Capablitis#PriceNotes Location
    MakeModelSet Size
    $
    56326
    Applied Materials P5000100 mm3Can be configured to your specifications1 F*Scotia, NY
    23215
    Applied Materials P5000 MARK II3TEOS Deposition, Oxide Etch1 F*Scotia, NY
    30246
    Plasma-Therm VLR 700 VLR-PM1-ICRB-PM100 mm1Nitride Depostion1 F*Scotia, NY
    137546
    Tokyo Electron Ltd TEL Trias TI/TiN-ALD for 12" / 300 mm300 mm41 F*Regensburg, BY

    NOTE:
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       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Cluster PECVD Tools:
    Applied Materials, Inc., Plasma-Therm, Tokyo Electronics Limited