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Single Chamber PECVD Tools

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Item IDPhotoItem DescriptionSize RangeCass to CassLoadlock#PriceNotes Location
MakeModelSet SizeLoadlock Y/N
Astex AX5000, AX6000, AX6350 or similar1 F*Leominster, MA
Astex AX6500 "Clamshell" MPCVD1 F*N*Leominster, Massachusetts
Astex ECR-MOCVD-PECVD1 F*Leominster, MA
187926 Cline Innovations Custom CVD Diamond System1 F*Leominster, MA
Nexx Systems Cirrus 300YES1 F*Scotia, NY
Oxford Instruments Plasmalab System 100YES1 F*Scotia, NY
147470 Plasma-Therm 790 PECVD 11"1 F*Scotia, NY

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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Single Chamber PECVD Tools:
Astex, Cline Innovations, Nexx Systems, Oxford Instruments, Plasma-Therm