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Other Plasma Processing Equipment and Tools


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Item IDPhotoItem DescriptionDescriptionCondition#PriceNotes Location
MakeModel
$
178357
AMAT Centura1 Malta, NY
178356
AMAT Centura AP, AdvantEdge G5 Cold Idle - In Fab1 Dresden, SN
178359
AMAT DPS II Metal WManufactured in 2005; Status: Bagged and Skidded1 F*Taichung, Taichung City
178362
AMAT DT HARTManufactured in 2006; Status: Bagged and Skidded1 Taichung, Taichung City
180513 Applied Materials 3750-011290.5kW Heat Exchanger with female NPT connections1 Leominster, MA
192794
Applied Materials Centura DPS Metal WMetal Etch 3 Chambers1 N*Taichung, Taichung City
192757
Applied Materials Centura DPS Poly EtchDPS II Poly Etch System, 300mm1 N*Taichung, Taichung City
192745
Applied Materials Centurae-MAX CT+300mm Oxide EtcherVery Good1 N*Taichung, Taichung City
184652 Applied Materials FI20104 (3750-01111)3-way Circulator1 Leominster, MA
184653 Applied Materials FI20170 (0760-01028)3-way Circulator1 Leominster, MA
189082 Applied Materials P5000 - Mark IITEOS Dep - Etchback 1 Singapore,
165710
Astex Alternative to Model LSDummy Load for 1.5kW systemsExcellent1 Sterling, MA
63666
Astex AX 7610Chemical Downstream Plasma Source2 Scotia, NY
184064 Astex AX30301.5kW Dummy Load1 Leominster, MA
165747 Astex AX30323-way water-cooled circulator with integrated c...1 Sterling, MA
85963
Astex AX3041Three Stub Tuner2 1,200.00 Scotia, New York
165751
Astex AX31203-Way Circulator with integrated directional co...1 Sterling, MA
190140 Astex AX31513-way Circulator1 N*Leominster, Massachusetts
165749 Astex AX3153Water-cooled Dummy Load with FPT connections1 Sterling, MA
165748 Astex AX3153-1 (3750-01145)Water-cooled Dummy Load with FPT connectionsExcellent1 Sterling, MA
190257 Astex CPR340 or equivalentAstex rectangular waveguide size adaptor2 N*Leominster, Massachusetts
165750 Astex CS23-Way Circulator w/ Directional Coupler1 Sterling, MA
190326 Astex CS340 or equivalentAir-cooled circulator with gold-plated SMA conn...1 N*Leominster, Massachusetts
165746
Astex FI20166 (3750-01147)3kW SmartMatch microwave tuner1 Sterling, MA
184611 Astex LS340WR340 Water-Cooled Dummy Load1 Leominster, MA
174643 Astex TSM2Three Stub Auto TunerVery Good1 Leominster, MA
178365 Ci Science Torus 300KManufactured in 2005; Status: Bagged and Skidded1 Taichung, Taichung City
168904 Cober ST89-10196kW Dummy Load (Water Load)1 Leominster, MA
62551
Hitachi M150PMagnetron Assembly/High Frequency1 Scotia, NY
62550
Hitachi M150PMagnetron Assembly/Low Frequency1 Scotia, NY
178368 LAM 2300 Versys WManufactured in 2005; Status: Bagged and Skidded1 N*Taichung, Taichung City
183764
LAM RAINBOW 4428XL200mm POLY/NITRIDE ETCHER1 Singapore,
189088
LAM TCP 9608Metal Etch1 F*Singapore,
178371
LAM TCP9408SEManufactured in 19981 Singapore,
178372
LAM TCP9408SEManufactured in 19961 Singapore,
178373
LAM TCP9408SEManufactured in 19971 Singapore,
178375
LAM TCP9408SEManufactured in 1997; Status: Bagged and Skidded1 Singapore,
180737
LAM Research Corp. RAINBOW 4428XLRAINBOW 4428XL, 200mm , Poly Nitride EtcherGood1 Singapore,
191597
LAM Research Corp. 2300 Stretch ATM + VTMPoly Etch & Wet Processing1 F*N*Dresden, Saxony
180736 LAM Research Corp. 4428 RainbowRAINBOW 4428, 200mm, POLY/NITRIDE ETCHER1 Singapore,
185290
LAM Research Corp. Rainbow 4428xlNitride Etch1 F*Singapore,
185292
LAM Research Corp. Rainbow 4428xlNitride Etch1 Singapore,
189125
LAM Research Corp. TCP 9608Al Etcher1 Singapore,
180735
LAM Research Corp. TCP 9608 SETCP 9608 SE ALUMINIUM ETCHING SYSTEM1 Singapore,
121502
MKS Instruments ASTRON iRemote Plasma Source3 Scotia, NY
184616 MKS Instruments AX2530PPD or equivalent3kW Precision Power Detector (PPD)1 Leominster, Massachusetts
183180 MKS Instruments FI20634Astex SmartPower 3-stub tuner with integrated PPDExcellent1 Leominster, MA
185723 MKS Instruments, Inc FI201643kW PPD1 Leominster, MA
185724 MKS Instruments, Inc FI20164-11 Leominster, MA
192493 Samco PC-1100Parallel plate plasma cleaning system1 N*Sunnyvale, California
178376
Scientech OXIDE ETCH 8"Status: Bagged and Skidded1 Singapore,
182416
Shibaura CDE300 CDE300, 300mm, Isotropic Chemical Dry Etch1 Malta, New York
178378 Tel 8500PEStatus: Bagged and Skidded1 Singapore,
178379 Tel 8500PEManufactured in 1997; Status: Bagged and Skidded1 Singapore,
178380 Tel 8500PEManufactured in 19951 Singapore,
178381 Tel 8500PEManufactured in 19961 Singapore,
178382 Tel 8500PEManufactured in 19961 Singapore,
178383 Tel 8500PEManufactured in 1995; Status: Bagged and Skidded1 Singapore,
178384 Tel TE 8500Manufactured in 1996; Status: Bagged and Skidded1 Singapore,
178385
Tel Telius SP 304 polyManufactured in 2007; Status: Bagged and Skidded1 Taichung, Taichung City
178388 Tel Telius SP 305 SCCM TEManufactured in 2007; Status: Bagged and Skidded1 N*Taichung, Taichung City
190701
Tokyo Electron Limit Unity II, 855SS 200mm Etcher1 N*Burlington, Vermont
183763 Tokyo Electron Ltd 8500PEOxide Etch Tool , 200mm1 Singapore,
180734 Tokyo Electron Ltd 8500PE8500PE, 200mm, RATC Oxide EtcherVery Good1 Singapore,
190751 Tokyo Electron Ltd Tactras1 N*Malta, New York
182574
Tokyo Electron Ltd Telius 308S SCCM DT, CHAMBER ONLYDeep trench Si etch process chamber1 Fishkill, NY
191511
Tokyo Electron Ltd Unity 2EOxide Etch - Via1 N*Singapore,
191541
Tokyo Electron Ltd Unity e 85DDEtch1 F*Singapore,
191510
Tokyo Electron Ltd Unity ME SCCMCu Via Oxide etch1 N*Singapore,
124316
YES CV100PZMicrowave Downstream Asher--2.4 GHz1 Scotia, NY

NOTE:
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   reference document attached
  F* if the item is specially featured
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  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Other Plasma Processing Equipment and Tools:
Applied Materials, Inc., Astex, Ci Science, Cober, Hitachi, LAM, LAM Research Corp., MKS Instruments, Inc., Samco, Scientech, Shibaura, Tel, Tokyo Electron Limited, Tokyo Electronics Limited, Yield Engineering Systems