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Single Chamber RTP Tools


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  • Item IDPhotoItem DescriptionDescriptionCass to Cass#PriceNotes Location
    MakeModel
    $
    3502
    AG Associates 2101Rapid Thermal Processing System for 3"-5" Wafers1 F*Plano, TX
    3322
    AG Associates 2106Rapid Thermal Processing System for 3"-6" WafersYES1 F*Plano, TX
    111094
    AG Associates 210MRapid Thermal Processing System1 F*Plano, TX
    42890
    AG Associates 2146Single Chamber RTP ToolYES1 F*Scotia, NY
    51726
    AG Associates 410 Controller Only410 Controller Only1 F*Plano, TX
    49891
    AG Associates Heatpulse 2146Single Chamber RTPYES1 F*Plano, TX
    187754 Mattson Technology SHS 2800Rapid Thermal Anneal Processor1 Singapore,
    157047
    Modular Process Tech RTP-600xpRapid Thermal Processing System1 Plano, TX

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Single Chamber RTP Tools:
    AG Associates, Mattson Technology, Modular Process Technology