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Single Chamber RTP Tools


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Item IDPhotoItem DescriptionDescriptionCass to Cass#PriceNotes Location
MakeModel
$
3502
AG Associates 2101Rapid Thermal Processing System for 3"-5" Wafers1 F*Plano, TX
3322
AG Associates 2106Rapid Thermal Processing System for 3"-6" WafersYES1 F*Plano, TX
111094
AG Associates 210MRapid Thermal Processing System1 F*Plano, TX
42890
AG Associates 2146Single Chamber RTP ToolYES1 F*Scotia, NY
51726
AG Associates 410 Controller Only410 Controller Only1 F*Plano, TX
49891
AG Associates Heatpulse 2146Single Chamber RTPYES1 F*Plano, TX
193335
Mattson Technology Helios300mm RTP system1 N*Singapore,
157047
Modular Process Tech RTP-600xpRapid Thermal Processing System1 Plano, TX

NOTE:
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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Single Chamber RTP Tools:
AG Associates, Mattson Technology, Modular Process Technology