Serving  Our Guest Log in    Register to bid, list, and tradeHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools    View    Search-by-Specs    Input    Edit    

FULL DESCRIPTION of Item 3011

in Metal Etchers
Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York
 
Item ID: 3011

Offered1 Offered at Best Price


PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM

Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM
  Click to see additional image(s)... other images

Location: Scotia, NY
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model Wafer Batch 740/740
Wafer Size Range 
  Minimum 100 mm
  Maximum 200 mm
Process Plasma and Reactive Ion Etch
Controller Type Microprocessor Controller Type
End Point Detection Included
High Vacuum Pump Leybold 361C
Roughing Pump Ebara A10S
RF Generator Model None
Number of Gas Inputs Four Gas
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model Tek-Temp MM1500/3000
Other Information Refurbishment to include the following:
  • Control Upgrade:
    Our operating system upgrade has been developed as a direct replacement control system for PlasmaTherm process tools using off-the-shelf IO components and modern Windows Vista compatible control system software. A complete replacement of all IO and signal wiring is performed. None of the original IO is used. A full set of system documentation is provided which includes wiring diagrams, IO listings, OEM equipment spec sheets, and full system software source code.
  • MFCs will be sent out for cleaning and recalibration; filters will be replaced.
  • Wet clean of process chambers.
  • Installation of rebuilt Leybold 361C turbo pump and controller.
    NB: Please note that the dual chamber configuration is designed to operate sequentially. The RF generator and vacuum sources are shared for each process chamber. However each chamber has its own set of four MFCs.

  • Exterior Dimensions 
      Width 45.000  in  (114.3 cm)
      Depth 43.000  in  (109.2 cm)
      Height 73.000  in  (185.4 cm)

    OFFERED BY: (click name below to visit its website directly)

    Capovani Brothers Inc.
    Scotia , New York
    1.518.346.8347
     
    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
     
    Payment:

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions

     


    Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York