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FULL DESCRIPTION of Item 50044 in

Solvent Wet Stations

Deal directly with:  Catalyst Equipment Corporation of Plano, TX
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Offered1 Offered at Best Price


Akrion UP-V2 SA.2300

5 Tank Semiautomatic Solvent Process Station


Akrion UP-V2 SA.2300
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Location: (Plano, TX )
Unit Price Unstated
Number of Units 1
ManufacturerAkrion
ModelUP-V2 SA.2300
Wafer Size Range
  Minimum75 mm
  Maximum200 mm
  Set Size150 mm
Number of Positions5
Number of Robots2
Position 1
  Tank MaterialStainless Steel
Position 2
  ProcessQuick Dump Rinse
  Tank MaterialStainless Steel
Position 3
  Tank MaterialStainless Steel
Position 4
  ProcessQuick Dump Rinse
  Tank MaterialStainless Steel
Position 5
  Tank MaterialStainless Steel
Automatic Wafer TransferYES
Automatic Wafer Transfer TypeRotary Robot
Controller TypePC Controller Type
Other Information
  • 2ea 2 Axis (Z & θ) Transfer Robots with Dual 6” Passive Grip End Effectors
  • 3ea Stainless Steel Process Tanks
  • Inner Tank Inner Dimensions: 7¾” (w) X 16” (l) X 8” (d)
  • External Tank Inner Dimensions 11” (w) X 21” (l) X 11” (d)
  • Solvent Pump/Filtration System for Each Tank
  • 2ea Halar Quick Dump Rinse Tanks
  • Tank Inner Dimensions: 8½ ” (w) X 16½” (l) X 9” (d)
  • Windows NT OS with Color GUI
  • CO2 Fire Suppression System with Notifier RP-1002 Extinguishing Agent Release Panel
Power Requirements208 V     60.0 A     60 Hz     3 Phase
ConditionNew-Never Used

Source: (click name below to visit its website directly)

  Catalyst Equipment Corporation of Plano, TX



Deal directly with:  Catalyst Equipment Corporation of Plano, TX
  COUNTER Offer     Send QUESTIONS