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 Location: (Plano, TX ) |
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| Unit Price |
Unstated |
| Number of Units |
1 |
| Manufacturer | Akrion |
| Model | UP-V2 SA.2300 |
| Wafer Size Range |  |
 | | Minimum | 75 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Number of Positions | 5 |
| Number of Robots | 2 |
| Position 1 |  |
 | | Tank Material | Stainless Steel |
| Position 2 |  |
 | | Process | Quick Dump Rinse |
| Tank Material | Stainless Steel |
| Position 3 |  |
 | | Tank Material | Stainless Steel |
| Position 4 |  |
 | | Process | Quick Dump Rinse |
| Tank Material | Stainless Steel |
| Position 5 |  |
 | | Tank Material | Stainless Steel |
| Automatic Wafer Transfer | YES |
| Automatic Wafer Transfer Type | Rotary Robot |
| Controller Type | PC Controller Type |
| Other Information |
- 2ea 2 Axis (Z & θ) Transfer Robots with Dual 6” Passive Grip End Effectors
- 3ea Stainless Steel Process Tanks
- Inner Tank Inner Dimensions: 7¾” (w) X 16” (l) X 8” (d)
- External Tank Inner Dimensions 11” (w) X 21” (l) X 11” (d)
- Solvent Pump/Filtration System for Each Tank
- 2ea Halar Quick Dump Rinse Tanks
- Tank Inner Dimensions: 8½ ” (w) X 16½” (l) X 9” (d)
- Windows NT OS with Color GUI
- CO2 Fire Suppression System with Notifier RP-1002 Extinguishing Agent Release Panel
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| Power Requirements | 208 V 60.0 A 60 Hz 3 Phase
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| Condition | New-Never Used |