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Plasma Processing Equipment


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List all 19 product types under Plasma Processing EquipmentList all 19 product types under Plasma Processing Equipment


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Displaying 101-137 of 137  Page  Show Previous Page  No Next Page
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
203278
MKS Instruments, Inc  

MKS Instruments, Inc  

3750-01145 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OEM Water-Cooled Dummy Load:
  • One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
  
  
  
  
  
  
  
  

 

1   Leominster, Massachusetts
244285
Oxford Instruments  

Oxford Instruments  

OPAL 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool:

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool

1   Malta, New York
208462
Plasma-finish  

Plasma-finish  

V15G 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT:

Plasma Box Etcher System

PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish

1   Scotia, New York
225948
Plasma-Therm  

Plasma-Therm  

790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 80,000.00 USD
1 80,021.44 Plano, Texas
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:

Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

 

1   Scotia, New York
4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:

Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems

1   Scotia, New York
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:

Combination Plasma Deposition System/RIE

1   F* Scotia, New York
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:

Plasmatherm RIE/Plasma Etch System

1   F* Scotia, New York
165893
PlasmaQuest  

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
  • System can be offered "as is" to experienced buyers.
  • Full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
  • Computer controller may function, but upgrade is recommended and should be possible.
1   Leominster, Massachusetts
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1   Scotia, New York
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

1   F* Scotia, New York
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 11":

Reactive Ion Etch System - 11" Electrode

1   F* Scotia, New York
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:

Reactive Ion Etch System
11" Electrode

1   Scotia, New York
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1   Scotia, New York
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:

Shuttle Load Lock System

1   Scotia, New York
230353
Advanced Energy  

Advanced Energy  

B0111-DPXX-105-XX 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

Profibus communication board for Advanced Energy CESAR generators:

Profibus communication board for Advanced Energy CESAR generators

5   Scotia, New York
197844
Sairem  

Sairem  

6kW  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Sairem 6kW water-cooled isolator:
  • 3-way microwave circulator and dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
2   Leominster, Massachusetts
179021
Seren  

Seren  

CEX-6 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

SEREN IPS COMMON EXCITER:

Common Exciter - Part number 9500170000

2   Scotia, New York
126554
Seren  

Seren  

IPS-R300 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

SEREN RF GENERATOR POWER SUPPLY 300W 13.56 MHz:

RF Generator

1 3,100.83 Scotia, New York
179019
Seren  

Seren  

R601 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

SEREN RF GENERATOR, 600 WATTS:

RF Generator
Part number 9600610028.

You may also be interested in Seren MC2 Matching Network Controller

6   Scotia, New York
240477
SOLVISION  

SOLVISION  

PRECIS 3D 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

SOLVISION, PRECIS 3D, s/n: C1W010150609:

SOLVISION, PRECIS 3D, s/n: C1W010150609

1   F* Dresden, Saxony
231656
SPI Supplies  

SPI Supplies  

Plasma Prep III 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

SPI BENCHTOP PLASMA ETCHER 100 WATT:

Solid State Plasma Etcher/Asher

1 6,501.74 Scotia, New York
84296
Surface Tech Sys  

Surface Tech Sys  

308 PC 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT:
Barrel Plasma Etcher
1   Scotia, NY
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:

Chlorine Etcher - Year 2003

1   Scotia, New York
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:

Silicon Etcher - Year 2003

1   Scotia, New York
184779
Technics  

Technics  

Micro Stripper -- Series 200 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:

Technics Micro Stripper Series 200 Plasma System

1   F* Scotia, New York
245287
Tokyo Electron Limit  

Tokyo Electron Limit  

TE8500 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

TEL, TE8500, 200mm. S/N K85500:

TEL, TE8500, 200mm. S/N K85500

1   Singapore
181401
Tepla  

Tepla  

4011 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

TEPLA PLASMA ETCHER 4000 WATT:

Planar Plasma Etcher

1   F* Scotia, New York
119294
Trion Technology  

Trion Technology  

Oracle 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:

Dielectric Cluster Tool


Trion Technology Oracle

1   F* Scotia, New York
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

ULVAC FERROELECTRIC ETCHER:

Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

 

1   F* Scotia, New York
214757
Applied Materials  

Applied Materials  

FI20132 0040-36436 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
1   Leominster, Massachusetts
202813
Applied Materials  

Applied Materials  

0190-00362 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
1   Leominster, Massachusetts
202812
Applied Materials  

Applied Materials  

0190-00363 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
1   Leominster, Massachusetts
197422
Waveline  

Waveline  

225-01 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Waveline Water-cooled 3-way Circulator :
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • 3kW CW rating.
  • Ceramic magnets look fine.
  • UG-584/U round-flange connections.
  • Photos provided upon request.
1   Leominster, Massachusetts
215283
WR430 to WR340 Rectangular Waveguide Adaptor 
WR430 to WR340 Rectangular Waveguide Adaptor 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WR430 to WR340 Rectangular Waveguide Adaptor:
  • Aluminum microwave waveguide transition painted with black "orangepeel" finish.
  • Photos can be provided upon request.
1   Leominster, Massachusetts
124316
Yield Engineerng Sys  

Yield Engineerng Sys  

CV100PZ 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

YIELD ENGINEERING DOWNSTREAM MICROWAVE PLASMA RESIST STRIPPER:

Plasma Resist Stripper
Cassette to Cassette or Manual Operation



Yield Engineering YES-CV100PZ

1   Scotia, New York
170454
National Electronics  

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

YJ1191A 6kW magnetron tube:
  • Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
  • Test results can be provided upon request prior to purchase.
1   Leominster, Massachusetts
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Processing Equipment:
Advanced Energy, Advanced Plasma System, Inc., Applied Materials, Inc., Astex, Axcelis/Eaton, Balzers, Branson/IPC, Cober, Comdel, Connecticut Microwave, Daihen, Ebara, ENI Power Systems, FEI, Fischerscope, Gasonics, Gerling, Hitachi, Japan Radio Co., LAM Research Corp., March Instruments, Mattison, Metroline, MKS Instruments, Inc., Muegge, National Electronic, National Electronics, Novellus Systems, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, Sairem, Seren, SOLVISION, SPI Supplies, Surface Technology Systems, Technics, Tepla, Tokyo Electron Limited, Trion Technology, Ulvac, Waveline, Yield Engineering Systems