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Thermal Processing Equipment


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List all 12 product types under Thermal Processing EquipmentList all 12 product types under Thermal Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
237203
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

Advance 400:

Both Tubes are in good condition.

Last maintenance was in Dezember 2021.

Tube 1D was last used January 2022

Tube 2D was last used August 2022

Tool is in original condition

1   Villach, Carinthia
237239
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

Advance 400:

Reactor 2 is still in Production

Both Tubes are in good condition.

Last maintenance was in Dezember 2022.

Heating Cassette from 1D is broken.

Tool is in original condition

 

1   Villach, Carinthia
217150
AET Technologies  

AET Technologies  

Rapid Annealing Furnace 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AET TECHNOLOGIES Rapid Annealing Furnace:

AET TECHNOLOGIES Rapid Annealing Furnace

  • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
  • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
  • EUROTHERM 7300A Three Phase Power Controller
  • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
  • LEYBOLD Display One Single Channel Vacuum Gauge Display
  • VAT 24428-KA31 Pneumatic HV Right Angle Valve
  • TELSTAR RD-9 Vacuum Pump
  • HORIBA SEC-E40 Mass Flow Meter
  • HORIBA ROD-1 MB Modular Readout
  • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
  • Heating power: 50kW
  • Input Power: 380-400VAC; 3Ph; 50Hz 125A
1   Plano, Texas
111094
AG Associates  

AG Associates  

210M 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AG Associates Heatpulse 210M:
Rapid Thermal Implant Monitor
1   F* Plano, TX
236583
AG Associates  

AG Associates  

Heatpulse 410 

List all items of this typeBenchtop RTP Tools

in Rapid Thermal Processing Equipment

AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool:

AG ASSOCIATES Heatpulse 410 Rapid Thermal Processor

  • Serial Number 1K7043 
  • Single Wafer Process
  • Single Rotometer Controlled Gas Channel
  • Multi-Step Process Cycle Capability
  • Programmable Ramp-Up Rates from 10ºC-250ºC/sec.
  • 450 - 1150ºC Recommended Operating Temp Range; 1,250ºC Peak Temperature
  • Thermocouple Temperature Control
  • 1-300 Seconds Processing Cycle
  • PC Controller with pCat Software
  • 208V, 3Ph, 60Hz, 90A Input Power
  • Price: ………………………………………………….……..………..$ 29,500.00
1 29,507.91 Plano, Texas
246604
Applied Materials  

Applied Materials  

CENTURA EPI 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AMAT, CENTURA EPI, 200mm, S/N 21792:

AMAT, CENTURA EPI, 200mm, S/N 21792

1   Singapore
246375
Applied Materials  

Applied Materials  

CENTURA 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AMAT, Centura, sn: 402970-R3-MAC, 300mm:

AMAT Centura 300mm

1   East Fishkill, New York
248206
ASM  

ASM  

ASM3200 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

ASM, ASM3200, 300mm, S/N 034120:

ASM, ASM3200, 300mm, S/N 034120

1   Singapore
242019
ATV Technologie GmbH  

ATV Technologie GmbH  

PEO 602 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 602 tube furnace:

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1   Warstein, North Rhine-Westphalia
242018
ATV Technologie GmbH  

ATV Technologie GmbH  

PEO 603 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 603 tube furnace :

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1   Warstein, North Rhine-Westphalia
240586
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

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Furnance:

Furnance will be sold without Reactor 2

Parts for sale:

WIP

Reactor 1 Poly

Cassetteheater

Robot Housing

Power Cabinet

 

1   Villach, Carinthia
231620
Bruce (BTI)  

Bruce (BTI)  

DSVA 24 

List all items of this typeHorizontal Diffusion Furnaces

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Furnance BDF-41 Ofen 28B:

Diffusion Furnance for atmospheric oxid processes.

Tool is productive in use until 27.06.2022

1   Villach, Carinthia
202834
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

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HITACHI KOKUSAI, DJ-1236VN-DF, 300mm:

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm

1   Malta, New York
243313
Hitachi Kokusai Elec  

Hitachi Kokusai Elec  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, s/n: DN23300, FVX2488:

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, FVX2488

Vertical LPCVD Furnace

1   Malta, New York
247204
Mattson Technology  

Mattson Technology  

AST 2800 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson, AST 2800, 200mm, S/N 97060361:

Mattson, AST 2800, 200mm, S/N 97060361

1   Singapore
50992
Canary Technology  

Canary Technology  

CT 3533-130 

List all items of this typeHorizontal Diffusion Furnaces

in Diffusion Furnaces

THERMCO/TEMPRESS TUBE FURNACE:

Six Pack Tube Furnace consisting of one three stack 4" capable and one 6" capable three stack furnace

Two three stack Thermco furnace banks sharing one laminar flow, bulk head mount, manual pull station with Tempress Model 263 Controllers.
Left side bank was refurbished and upgraded(Canary Tech.) to 150mm capable MRL Black Max heating elements with one year of use.

Furnace will be sold AS IS WHERE IS

1   F* Scotia, New York
246567
Ultratech Inc  

Ultratech Inc  

LSA100A 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

ULTRATECH LSA100A, s/n: 6114, Laser Spike Anneal:

Laser Spike Anneal

1   Dresden, Saxony
133220
Zircar  

Zircar  

FX2254 

List all items of this typeHorizontal Diffusion Furnaces

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ZIRCAR HEATER MODULE 1300°C:

Furnace Tube

Zircar HTMOD FX2254

1   F* Scotia, New York


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Thermal Processing Equipment:
AET Technologies, AG Associates, Applied Materials, Inc., ASM, ATV Technologie GmbH, Bruce (BTI), Canary Technology, Hitachi Kokusai Elec, Kokusai, Mattson Technology, Ultratech Inc, Zircar