About Us Contact Us Terms & Conditions
Serving  Our Guest Log in    Register to bid, list, and tradeHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Wafer Fabrication Eq   View    Search-by-Specs    Input    Edit    

Plasma Processing Equipment


» Switch Major Category

  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
Displaying 101-141 of 141  Page  Show Previous Page  No Next Page
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
249043
Nexx Systems  

Nexx Systems  

STRATUS S300 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

NEXX STRATUS S300, 300mm, s/n: S00000131:

PLT03 NEXX STRATUS S300-FX ELECTROPLATING TOOL with ANCOSYS AUTOMATED ANALYSIS AND DOSING Unit

1   East Fishkill, New York
249044
Nexx Systems  

Nexx Systems  

APOLLO HP 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

NEXX APOLLO HP, 300mm, s/n: 379:

TEL NEXX APOLLO HP PVD SYSTEM SPT03

1   East Fishkill, New York
239647
Novellus Systems  

Novellus Systems  

INOVA NEXT 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm:

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm

1   Malta, New York
203278
MKS Instruments, Inc  

MKS Instruments, Inc  

3750-01145 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OEM Water-Cooled Dummy Load:
  • One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
  
  
  
  
  
  
  
  

 

1   Leominster, Massachusetts
244285
Oxford Instruments  

Oxford Instruments  

OPAL 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool:

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool

1   Malta, New York
208462
Plasma-finish  

Plasma-finish  

V15G 

Barrel/Box Plasma Etchers

in Plasma Etch Equipment

PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT:

Plasma Box Etcher System

PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish

1   Scotia, New York
225948
Plasma-Therm  

Plasma-Therm  

790 

Etchers - Other

in Single Chamber Plasma Tools

Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 80,000.00 USD
1 80,021.44 Plano, Texas
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

Metal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:

Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

 

1   Scotia, New York
4054
Plasma-Therm  

Plasma-Therm  

73/74 

Metal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:

Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems

1   Scotia, New York
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

Metal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:

Combination Plasma Deposition System/RIE

1   F* Scotia, New York
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

Metal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:

Plasmatherm RIE/Plasma Etch System

1   F* Scotia, New York
165893
PlasmaQuest  

PlasmaQuest  

6" Load-Lock 

Silicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
  • System can be offered "as is" to experienced buyers.
  • Full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
  • Computer controller may function, but upgrade is recommended and should be possible.
1   Leominster, Massachusetts
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

Metal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1   Scotia, New York
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

Poly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

1   F* Scotia, New York
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

Metal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 11":

Reactive Ion Etch System - 11" Electrode

1   F* Scotia, New York
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

Metal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:

Reactive Ion Etch System
11" Electrode

1   Scotia, New York
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

Etchers - Other

in Single Chamber Plasma Tools

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1   Scotia, New York
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

Etchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:

Shuttle Load Lock System

1   Scotia, New York
230353
Advanced Energy  

Advanced Energy  

B0111-DPXX-105-XX 

Radio Frequency (RF) Generators

in PVD Power Supplies

Profibus communication board for Advanced Energy CESAR generators:

Profibus communication board for Advanced Energy CESAR generators

5   Scotia, New York
197844
Sairem  

Sairem  

6kW  

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Sairem 6kW water-cooled isolator:
  • 3-way microwave circulator and dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
2   Leominster, Massachusetts
249042
SEMIgear  

SEMIgear  

Geneva 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

SEMIgear Geneva, 300mm, s/n: S16100101:

RFL02 SemiGEAR Reflow Tool

1   East Fishkill, New York
179021
Seren  

Seren  

CEX-6 

Radio Frequency (RF) Generators

in PVD Power Supplies

SEREN IPS COMMON EXCITER:

Common Exciter - Part number 9500170000

2   Scotia, New York
126554
Seren  

Seren  

IPS-R300 

Radio Frequency (RF) Generators

in PVD Power Supplies

SEREN RF GENERATOR POWER SUPPLY 300W 13.56 MHz:

RF Generator

1 3,100.83 Scotia, New York
179019
Seren  

Seren  

R601 

Radio Frequency (RF) Generators

in PVD Power Supplies

SEREN RF GENERATOR, 600 WATTS:

RF Generator
Part number 9600610028.

You may also be interested in Seren MC2 Matching Network Controller

6   Scotia, New York
240477
SOLVISION  

SOLVISION  

PRECIS 3D 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

SOLVISION, PRECIS 3D, s/n: C1W010150609:

SOLVISION, PRECIS 3D, s/n: C1W010150609

1   F* Dresden, Saxony
231656
SPI Supplies  

SPI Supplies  

Plasma Prep III 

Barrel Resist Strippers

in Plasma Resist Strippers

SPI BENCHTOP PLASMA ETCHER 100 WATT:

Solid State Plasma Etcher/Asher

1 6,501.74 Scotia, New York
84296
Surface Tech Sys  

Surface Tech Sys  

308 PC 

Barrel/Box Plasma Etchers

in Plasma Etch Equipment

STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT:
Barrel Plasma Etcher
1   Scotia, NY
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

Etchers - Other

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:

Chlorine Etcher - Year 2003

1   Scotia, New York
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

Silicon Etchers

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:

Silicon Etcher - Year 2003

1   Scotia, New York
184779
Technics  

Technics  

Micro Stripper -- Series 200 

Metal Etchers

in Single Chamber Plasma Tools

TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:

Technics Micro Stripper Series 200 Plasma System

1   F* Scotia, New York
245287
Tokyo Electron Limit  

Tokyo Electron Limit  

TE8500 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

TEL, TE8500, 200mm. S/N K85500:

TEL, TE8500, 200mm. S/N K85500

1   Singapore
181401
Tepla  

Tepla  

4011 

Barrel/Box Plasma Etchers

in Plasma Etch Equipment

TEPLA PLASMA ETCHER 4000 WATT:

Planar Plasma Etcher

1   F* Scotia, New York
119294
Trion Technology  

Trion Technology  

Oracle 

Cluster Plasma Tools - Oxide

in Cluster Plasma Tools

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:

Dielectric Cluster Tool


Trion Technology Oracle

1   F* Scotia, New York
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

Cluster Plasma Tools - Metal

in Cluster Plasma Tools

ULVAC FERROELECTRIC ETCHER:

Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

 

1   F* Scotia, New York
214757
Applied Materials  

Applied Materials  

FI20132 0040-36436 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
1   Leominster, Massachusetts
202813
Applied Materials  

Applied Materials  

0190-00362 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
1   Leominster, Massachusetts
202812
Applied Materials  

Applied Materials  

0190-00363 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
1   Leominster, Massachusetts
197422
Waveline  

Waveline  

225-01 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Waveline Water-cooled 3-way Circulator :
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • 3kW CW rating.
  • Ceramic magnets look fine.
  • UG-584/U round-flange connections.
  • Photos provided upon request.
1   Leominster, Massachusetts
215283
WR430 to WR340 Rectangular Waveguide Adaptor 
WR430 to WR340 Rectangular Waveguide Adaptor 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

WR430 to WR340 Rectangular Waveguide Adaptor:
  • Aluminum microwave waveguide transition painted with black "orangepeel" finish.
  • Photos can be provided upon request.
1   Leominster, Massachusetts
124316
Yield Engineerng Sys  

Yield Engineerng Sys  

CV100PZ 

Plasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

YIELD ENGINEERING DOWNSTREAM MICROWAVE PLASMA RESIST STRIPPER:

Plasma Resist Stripper
Cassette to Cassette or Manual Operation



Yield Engineering YES-CV100PZ

1   Scotia, New York
170454
National Electronics  

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A 

Radio Frequency (RF) Generators

in PVD Power Supplies

YJ1191A 6kW magnetron tube:
  • Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
  • Test results can be provided upon request prior to purchase.
1   Leominster, Massachusetts
Displaying 101-141 of 141  Page  Show Previous Page  No Next Page


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.