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Parallel Plasma Tools


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 Cluster Plasma Tools - Metal  in Cluster Plasma Tools  (1)

 Cluster Plasma Tools - Other  in Cluster Plasma Tools  (no items)

 Cluster Plasma Tools - Oxide  in Cluster Plasma Tools  (1)

 Cluster Plasma Tools - Poly/Nitride  in Cluster Plasma Tools  (no items)

 Cluster Plasma Tools - Silicon  in Cluster Plasma Tools  (no items)

 Cluster Plasma Tools - Tungtsten  in Cluster Plasma Tools  (no items)

 Etchers - Other  in Single Chamber Plasma Tools  (4)

 Metal Etchers  in Single Chamber Plasma Tools  (8)

 Oxide Etchers  in Single Chamber Plasma Tools  (2)

 Poly/Nitride Etchers  in Single Chamber Plasma Tools  (2)

 Silicon Etchers  in Single Chamber Plasma Tools  (2)

 Tungsten Etchers  in Single Chamber Plasma Tools  (no items)

Items from the following manufacturers are offered under Parallel Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Plasma-Therm, PlasmaQuest, Surface Technology Systems, Technics, Trion Technology, Ulvac